Microsystems, or microelectromechanical systems (MEMS), are a new and fast developing, interdisciplinary field. Microsystem dynamics is an important part of microsystem science. Microsystems, generally, are of inherent nonlinearity. In this paper, some nonlinear problems in microsystem dynamics are summed up from the angles of modelling, analysis, design, control, experiment, measurement, material, microfabrication, and so on, and the prospects of research directions in the future are given.
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