MESO-AND MICRO-SCOPIC MECHANICS FOR COMPLEX MICRO MECHANICAL-ELECTRICAL SYSTEMS

With the development of advanced technology,a lot of problems not covered completely by the classical mechanics have to be dealt with Which will be a great driving force for future development of applied mechanics,One of these important problems is the complex micro mechanical-electrical systems in cluding microelectric materials,components and systems and micro electrical- mechanical systems in microelectric technology,In the present paper,the in- dustry background and development of complex micro mechanic