Dynamics problems of micro/nano channel resonators for detection and characterization

YAN Han; ZHANG Wenming

doi:10.6052/1000-0992-18-006

Volume 49 Issue 1

Feb. 2019

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YAN Han, ZHANG Wenming. Dynamics problems of micro/nano channel resonators for detection and characterization[J]. Advances in Mechanics, 2019, 49(1): 201903. doi: 10.6052/1000-0992-18-006

Citation:

YAN Han, ZHANG Wenming. Dynamics problems of micro/nano channel resonators for detection and characterization[J]. Advances in Mechanics, 2019, 49(1): 201903. doi: 10.6052/1000-0992-18-006

YAN Han, ZHANG Wenming. Dynamics problems of micro/nano channel resonators for detection and characterization[J]. Advances in Mechanics, 2019, 49(1): 201903. doi: 10.6052/1000-0992-18-006

Citation:

YAN Han, ZHANG Wenming. Dynamics problems of micro/nano channel resonators for detection and characterization[J]. Advances in Mechanics, 2019, 49(1): 201903. doi: 10.6052/1000-0992-18-006

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Dynamics problems of micro/nano channel resonators for detection and characterization

doi: 10.6052/1000-0992-18-006

YAN Han,
ZHANG Wenming^{,
,}

State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China

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Author Bio:
corresponding Author: † E-mail: wenmingz@sjtu.edu.cn
Corresponding author: ZHANG Wenming
Received Date: 2018-04-22
Publish Date: 2019-02-08

Abstract

Abstract

Micro/nano-channel mechanical resonators have ultra-high resonance frequency, quality factor, and sensitivity in liquid environment. Hence they are usually used for high-precision detection and characterization in liquid environments. These resonators have broad application prospects in the fields of biology, medicine, and chemical industry. The detection and characterization functions of micro/nano-channel mechanical are highly dependent on their dynamic characteristics. Such devices are coupled systems composed of multiple components, including resonant structure, internal fluid, detected object, external excitation and so on. As a result, the involved dynamic problems are much complicated, and they have become a hotspot and bottleneck in the research of resonant devices. In this paper, the research progress of micro/ nano-channel mechanical resonators is reviewed. The dynamic design principles for high-precision detection and characterization are summarized. The dynamic characteristics, including stability, frequency response characteristics, energy dissipation, frequency fluctuations and so on, are discussed in detail. The physical mechanism of different dynamics and its influence on the performance of the resonator are expounded. It can provide theoretical reference and technical support for deep understanding of the dynamic design problem of micro/nano-channel mechanical resonators and improve the dynamic performance of the devices. And it is of great significance for the design, manufacture, and application of ultra-high frequency and ultra-high sensitivity devices.
- micro/nano-channel mechanical resonators,
- detection,
- characterization,
- quality factor

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References(96)

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